The focus of this multidisciplinary research effort is to use system and control analysis and design methodologies to develop improved methods for modeling and controlling re-entrant semiconductor fabrication lines.
Dr. Daniel E. Rivera.
Dr Armando A. Rodriguez, Dr. Kostas S. Tsakalis.
Dr. Matthias Kawski.
Dr. Dieter Armbruster, Dr. Tom Taylor.
|K. Kempf, "Intel Five-Machine Six Step Mini-Fab Description," Intel/ASU Report, 1994.|
|Time-Optimal Control for Re-entrant Semiconductor Fabrication Lines|
|A Release Policy Governor for Re-entrant Semiconductor Fabrication Lines|
|Hierarchical Modeling and Control of Re-entrant Semiconductor Fabrication Lines|
|A Control-Theoretic Approach to Scheduling of Semiconductor Fabrication Lines|
|Hierarchical Modeling and Control for Re- entrant Semiconductor Fabrication Lines: A Mini-Fab Benchmark (pdf)|